| 检测气体 | TLV值 | 检测范围 | 解析值 | | 磷 PH4 | 300ppb | 0--900ppb | 5 | | 四氢化硅 SiH4 | 5ppm | 0--15ppm | 0.25 | | 乙硼烷 B2H6 | 100ppb | 0--300ppb | 5 | | 胂 AsH3 | 50ppb | 0--150ppb | 1 | | 乙硅烷 SiH6 | 5ppm | 0--10ppm | 0.1 | | 硫化氢 HS2 | 10ppm | 0--100ppm | 1 | | 光气 COCl2 | 100ppb | 0--300ppb | 2 | | 氯气 Cl2 | 0.5ppm | 0--100ppb | 1 | | 硒化氢 H2Se | 50ppb | 0--300ppb | 2 | |